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Fabrication of crack-free strained SiGe/Ge multiple quantum wells on Ge-on-Si(111) by the patterning method
https://tcu-ar.repo.nii.ac.jp/records/2000145
https://tcu-ar.repo.nii.ac.jp/records/20001454fceb471-0a2f-41fd-ae67-bbe6050d1efd
| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2024-07-19 | |||||
| タイトル | ||||||
| タイトル | Fabrication of crack-free strained SiGe/Ge multiple quantum wells on Ge-on-Si(111) by the patterning method | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| アクセス権 | ||||||
| アクセス権 | open access | |||||
| アクセス権URI | http://purl.org/coar/access_right/c_abf2 | |||||
| 著者 |
金澤, 伶奈
× 金澤, 伶奈× 菊岡, 柊也× 芝原, 夕夏× 我妻, 勇哉× 澤野, 憲太郎 |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | We fabricate strained SiGe/Ge multiple quantum well (MQW) structures on Ge-on-Si(111). It is clearly found that high-density crystal cracks are generated in the MQW due to the accumulated tensile strain when the total thickness of the MQW increases beyond the critical thickness. In this study, we determine the critical thickness of the strained SiGe/Ge (111) MQW. Moreover, we demonstrate the mesa-patterning of the Ge-on-Si prior to the MQW growth can drastically suppress the crack formation, leading to the significant increase in the critical thickness. As a result, we find that room-temperature photoluminescence from the crack-suppressed MQW is highly enhanced. This indicates that the suppression of crack formation by the patterning method is very promising toward SiGe/Ge MQW embedded light-emitting device applications. | |||||
| 言語 | en | |||||
| 書誌情報 |
en : Materials Science in Semiconductor Processing 巻 177, 号 108300, p. 1-5, ページ数 5, 発行日 2024-03-23 |
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| 出版者 | ||||||
| 出版者 | Elsevier Ltd. | |||||
| 言語 | en | |||||
| ISSN | ||||||
| 収録物識別子タイプ | PISSN | |||||
| 収録物識別子 | 1369-8001 | |||||
| DOI | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | https://doi.org/10.1016/j.mssp.2024.108300 | |||||
| 権利 | ||||||
| 言語 | en | |||||
| 権利情報 | © 2024 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY license (http://creativecommons.org/licenses/by/4.0/). | |||||
| 関連サイト | ||||||
| 関連タイプ | isVersionOf | |||||
| 識別子タイプ | URI | |||||
| 関連識別子 | https://www.sciencedirect.com/science/article/pii/S1369800124001963 | |||||
| 関連名称 | https://www.sciencedirect.com/science/article/pii/S1369800124001963 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | AM | |||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||
